Synthesis of diamond films at the hottest ambient

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Synthesis of diamond films at room temperature

Abstract: carbon containing films were prepared by RF glow discharge at room temperature with CH containing gas mixture. The properties of the films were examined by Raman, XRD and SEM analysis. It was shown that the films contain a large amount of carbon SP3 bond diamond, and their grains are 10 ~ 100 nm, belonging to nano diamond films. This film has been widely used in the protection of glass lenses, plastics, disks and other commodities

key words: diamond film; Glow discharge; Nano

1 introduction

diamond is a kind of material with unique and many excellent properties, which can greatly improve the performance of products. As a functional material, it can be made into optoelectronic devices by using its excellent optical and electronic properties; As a protective material, it can increase the thermal conductivity, electrical insulation, wear resistance and chemical corrosion resistance of materials, and provide protection that other materials do not have; At the same time, it has good biocompatibility and can be used as the material of artificial organs. Therefore, it has a broad application prospect in the national economy, production, scientific research and national defense

chemical vapor deposition is the main method to prepare diamond films. They are hot filament chemical vapor deposition, microwave plasma chemical vapor deposition and plasma jet deposition. Among these deposition methods, high temperature of 600 ~ 800 ℃ is required for the substrate. At present, the method of depositing diamond film by chemical vapor deposition at room temperature has not been reported. It is reported that nano diamond films [1] were deposited by laser plasma discharge at room temperature. The content of SP3 in the deposited nano diamond films exceeded 75% and the grain size was 20 ~ 100 nm. This paper introduces the method and properties of diamond films deposited by RF glow discharge at room temperature

2 test method

test device is shown in Figure 1. The utility model is composed of a vacuum chamber and a radio-frequency power supply. A radio-frequency electrode is arranged in the vacuum chamber, and the substrate is placed on a pole

samples used for deposition include silicon and other materials. RF glow discharge adopts 13 56 MHz RF power supply

samples need surface cleaning treatment. After being put into the vacuum chamber, pre vacuumize and conduct plasma glow discharge treatment. After the cleaning treatment, the deposition test shall be carried out. The diamond films can be deposited on one side or both sides of the samples at the same time. The depositional conditions are listed in Table 1

Figure 1 Schematic diagram of RF deposition system

diamond films were deposited on samples with monocrystalline silicon, plastic and titanium substrates respectively, and the films were analyzed by Raman spectroscopy, X-ray diffraction and scanning electron microscopy in the State Key Laboratory of solid surface physical chemistry of Xiamen University

3 film properties

Cuk α ( λ= 1. 5406 a), the X-ray spectrum of the diamond film was measured, as shown in Figure 2, when gold was deposited on the plastic film, taking into account the influence of other components in the circuit on the resistance value. It has obvious diamond crystal plane structure, d = 2 07 corresponds to (111) face of diamond, d = 1 17 corresponds to the (220) surface of diamond, indicating that the film material contains diamond grains

Fig. 2 XRD pattern of deposited film

Raman spectrum of this film, as shown in Fig. 3. Two broad peaks were formed at 1337/cm and 1578/cm in the spectrum of titanium based samples. It can be determined that the film is composed of diamond and graphite. The two curves represent the spectra of the upper and lower surfaces of the sample after coating

Fig. 3 Raman spectrum of the deposited film

Fig. 4 is the SEM photo of the deposited film on the silicon wafer sample. It can be seen from the figure that the film is composed of uniform spherical grains with a diameter of 50 ~ 100 nm

Fig. 4 SEM photos of silicon samples

4 conclusion

through comprehensive analysis such as X-ray diffraction analysis, Raman spectrum measurement and SEM observation, it shows that the tested samples are mainly composed of nano diamond. We are also studying how the double-layer pressing plate composed of vacuum is composed of film spherical crystal particles connected together by adhesive, and its grain size is 10 ~ 100 nm. It is proved that diamond film can be formed at room temperature. The research on the film forming mechanism and the improvement of film quality, such as the investigation of the bearing capacity of the chair surface and back, is in progress


[1] coll ins C B, davanloo e, juengerman e m, et al Laser plasma source of amorphic diamond[J ] . Appl Phys

Lett ,1989 ,54∶216~218. (end)

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